material growth - Metal-Organic Chemical Vapor Deposition (MOCVD)

  • MOCVD room
    full view of MOCVD room
  • MOCVD machine #1
    MOCVD machine #1
  • MOCVD machine #2
    MOCVD machine #2
  • MOCVD machine #3
    MOCVD machine #3

  • MOCVD machine #4 and #5

  • MOCVD machine #6

  • HVPE

characterization

  • optics room full view
    PL measurements
  • Near Field Optical Microscope (NSOM)
    NSOM
  • AFM.jpg
    AFM

  • High-resolution AFM
  • Scanning Electron Microscope (SEM)
    SEM and e-beam lithography
  • X-Ray Mapping
    X-ray mapping
  • X-ray system
    X-ray Diffraction (XRD)

  • High-resolution XRD
  • Hall effect measurement
    Hall effect measurement
  • electrical conductivity measuring
    electrical conductivity
  • Optical Microscope, probe stations and micro-manipulators; I-V tracer for electrical and optical measurements.jpg
    probe stations

  • Spectroscopic ellipsometer

  • Neutron detector calibration

  • Thermal neutron source
  • device fabrication

    • Flip Chip Bonding.jpg
      Flip Chip Bonding machine
    • Laser lift-off.jpg
      Laser lift-off machine
    • HT annealing.jpg
      high temperature annealing machine
    • _ICP.jpg
      ICP etching machine
    • PECVD.jpg
      PECVD machine
    • wire bonding.jpg
      wire bonding machine
    • RTA.jpg
      RTA furnace
    • _deep UV photolithography.jpg
      deep UV photolithography machine
    • e-beam.jpg
      e-beam evaporator
    • wafer dicing.jpg
      wafer dicing system
    • Large-scale e-beam Evaporation System.jpg
      Large-scale e-beam evaporation
    This page links to all the state-of-the-art facilities that the Nanophotonics Center at TTU utilizes in their research. Please follow the links to get information and photographs of our research and progress.