Electrical and Computer Engineering
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Micro−Electro−Mechanical Systems (MEMS)


MEMS education consists of three classes: Introduction to MEMS (MEMS I), MEMS II, and MEMS III. These classes are open to undergraduate and graduate students. During MEMS I you will learn the basic concepts behind MEMS devices. Projects include device simulation and design. Students learn how to use state−of−the−art software tools that allow development of MEMS that can be fabricated at Sandia National Laboratories (SUMMiT fabrication process). MEMS II is geared toward developing advanced designs that are submitted to Sandia’s annual design competition. In MEMS III, students test and characterize actual devices. Dr. Dallas from the electrical engineering department and Dr. Berg from the mechanical engineering department teach the MEMS classes.