Micro−Electro−Mechanical Systems (MEMS)
Overview
Micro−Electro−Mechanical Systems (MEMS) research at Texas Tech includes the development of dynamic micro−machines that have applications that include
micro−positioning systems, micro-optical tools, and micro−analytical systems. We also study the mechanisms and environments that cause stiction as well as
developing ways to mitigate stiction failures. The research is funded by the National Science Foundation and the Welch Foundation. We offer three courses in MEMS and
related technologies.