Texas Tech University

Facilities

                 

Main Equipment

PA-MBE

MOCVD

PA-MBE
MOCVD

SEM & E-beam Nanolithography

 XRD

 SEM
 XRD

E-beam deposition system

Thermal deposition system

 E-beam evaporator  Thermal evaporator

Plasma Etching Systems

 Oxford  RIE

PECVD (P-5000)

Sputtering System

P-5000 Sputtering System

Electrical probe-station

Wire-bonder

Electrical Probe Station Wire bonder

Photo-lithography system

Optical profilometer

Lithography Optical profilometer

Nano Tech Center