Practice Tips:
•
Regarding exposure times for
curing SU-8 features on silicon
wafers, we have found it is
necessary to triple the exposure
energies recommended on
Microchem’s SU-8 data sheets.
•
It is important to periodically
check the UV power output
(using a dosimeter) because the
strength can vary substantially
over the bulb’s lifetime. The
exposure times should be
adjusted accordingly.